E-beam induced decomposition of inorganic solids

Abstract

A general model for the e-beam induced decomposition of covalent and ionin inorganic solids is outlined. The primary electron beam produces enegetic electron/hole pairs; these decay to the band edges, and either recombine or participate in the chemical decomposition of the solid. The kinetics and mechanism of several system is discussed, including CdCl2 and PbI2. The importance of temparature in decomposition is remarked and it is suggested that induced decomposition is remarked and it is suggested that induced decomposition mostly starts at 0.6 melting point (K). The usefulness of various inorganic systems, as resists, for x-ray masks, for local indiffusion sources and for metal inter-connects is noted.