Electron beam decomposition of CdCl2
| dc.contributor.author | Green, M. | |
| dc.contributor.author | Aidinis, C. J. | |
| dc.contributor.author | Fakolujo, O. A. | |
| dc.date.accessioned | 2018-10-09T14:57:43Z | |
| dc.date.available | 2018-10-09T14:57:43Z | |
| dc.date.issued | 1984 | |
| dc.description.abstract | The e-beam stimulated reaction, CdCl2 (s)----Cd(s) + 2Cl(g), has been studied in cadmium chloride thin films between 303 and 483K using 2-keV electrons. The dose required to make 90-mm-deep holes at 483K is 3 X10-3 Ccm-2. Extrapolated dosing levels of ~6X10-5 C cm-2 are expected. The use of CdCl2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimilated decomposition energetics and mechanism, is briefly discussed. | en_US |
| dc.identifier.issn | 0021-8979 | |
| dc.identifier.issn | 1089-7550 | |
| dc.identifier.other | Journal of Applied Physics 57(2), pp. 631-633 | |
| dc.identifier.other | ui_art_green_electron_1984 | |
| dc.identifier.uri | http://ir.library.ui.edu.ng/handle/123456789/1678 | |
| dc.language.iso | en_US | en_US |
| dc.publisher | American Institute of Physics. | en_US |
| dc.title | Electron beam decomposition of CdCl2 | en_US |
| dc.type | Article | en_US |